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Stanford Nanofabrication Facility
Lab User Guide

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      • Fab Project Courses: E241 & EE412
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      • Device Process Courses: EE410 and EE312
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    • Cleanliness Groups
      • "All" List of Tools
      • "Clean" List of Tools
        • "Clean-Ge" List of Tools
        • "Clean (MOCVD)" List of Tools
        • "Semiclean" List of Tools
      • "Flexible" List of Tools
    • New Process or Material Requests (PROM)
      • ProM Committee
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        • TMAH Checklist
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  • Useful Links
    • Run NEMO (login required)
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    • Wafer Dopant and Resistivity Specs
    • Face shield cleaning using steamer
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  • Equipment
    • Equipment Name Table
    • Characterization
    • CVD
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    • Dry Etch
    • Metallization
    • Oxidation and Annealing
    • Photolithography
    • Wet Chemical Processing

Materials

  • Overview
    • Chemicals & Materials
  • Cleanliness Groups
    • "All" List of Tools
    • "Clean" List of Tools
      • "Clean-Ge" List of Tools
      • "Clean (MOCVD)" List of Tools
      • "Semiclean" List of Tools
    • "Flexible" List of Tools
  • New Process or Material Requests (PROM)
    • ProM Committee
    • ProM Approach
    • TMAH Protocols
      • TMAH Checklist
    • PROM (PRocess and Materials) Form
    • PROM archive view
  • Chemicals List
    • Acids
    • Bases
    • Developers
    • Metal Etchants
    • Other Chemicals
    • Primer
    • Resists
    • Solvents
  • Substrate Types and Sizes
  • Materials List
  • Gases List

Norland Optical Adhesive

  • Projects

AGILE: Axially Graded Index Lens Fabrication- Final Report -- (Report)

AGILE: Axially Graded Index Lens Fabrication- Final Presentation -- (Presentation)

Nanoscribe Microfluidic Devices at SNF
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