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10% Hydrogen in Nitrogen
Chemical Formula:
10% H
2
in N
2
Gases Equipment Tabs
Etch Equipment Table
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Anneal/Oxidation Equipment Table
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Tylan9 Forming Gas Anneal Furnace
tylan9
Flexible
SNF Cleanroom Paul G Allen L107
SiO
2
Tylanfga Forming Gas Anneal Furnace
tylanfga
Semiclean
SNF Cleanroom Paul G Allen L107
100.00 Å
-
100.00 Å