Supercritical Carbon Dioxide (liquid) is used to dry wet surfaces without surface tension. This is often effectively used in MEMS device fabrication.
Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
---|---|---|---|---|---|
Critical Point Dryer Tousimis Automegasamdri-915B cpd |
Critical Point Dryer Training 2.00 hours |
SNF Cleanroom Paul G Allen L107 |
CO2 drying after release of micromachined devices |