PROM Request Title: 
ALD oxides in teos2
PROM Request Summary: 
High quality oxides from teos2 required for devices, so contamination mitigation plan proposed to allow ALD films from Fiji1 to process in clean teos2.
PROM Date: 
08/04/2016 (all day)
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
ALD oxides in teos2
Equipment List: 
Fiji 1 ALD (fiji1)