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Stanford Nanofabrication Facility
Lab User Guide
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Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
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Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Equipment
Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Wet Chemical Processing (link to Processing Techniques)
Oriel Deep UV Exposure Lamp (oriel-duv)
Cleanliness:
Flexible
Processing Technique(s)
Other
Lab Organization, Location, and NEMO Information
Lab Organization:
(SNF Exfab)
Location:
SNF Exfab Paul G Allen 155A Venice
NEMO Area:
nSiL: 155A Venice
NEMO ID:
oriel-duv
Training and Maintenance
Lab Facility:
SNF Exfab
Primary Trainer:
Gary Sosa
Primary Maintenance:
Gary Sosa
Steps to become a tool user
Become a
member of SNF
.
Contact the primary trainer:
Gary Sosa