PROM Request Title: 
PbS in Fiji3
PROM Request Summary: 
Request to use Fiji3 for processing of PbS films on carrier wafer.
PROM Date: 
02/20/2015 (all day)
PROM Decision: 
Request approved. As long as carrier wafer is used, processing on Fiji3 permitted even after Fiji2 is up.
Link to PROM Request and supporting documentation: 
PbS in Fiji3
Equipment List: 
Fiji 3 ALD (fiji3)