Brewer Science Protective coatings for LIGO MEMS process
PROM Request Title:
Brewer Science Protective coatings for LIGO MEMS process
PROM Request Summary:
Use of LIGO as hardmask for MEMS process.
PROM Date:
10/04/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
