Annealing of 1 cm2 GaAs Chip at 450 C in RTA
PROM Request Title:
Annealing of 1 cm2 GaAs Chip at 450 C in RTA
PROM Request Summary:
Procedure to anneal As containing chips at high temperatures while minimizing safety risk for inhaling As.
PROM Date:
03/10/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
