70-nm-thick Al2O3 ALD deposition by Fiji-1 in SNF
PROM Request Title:
70-nm-thick Al2O3 ALD deposition by Fiji-1 in SNF
PROM Request Summary:
Request for depositon that is thicker than allowed.
PROM Date:
05/13/2021
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
