Project Type: 
nano@stanford Fellowship
Date: 
October 2019 (all day)
Areas of Interest: 
Electron Beam Lithography
Processing Technique (former Function and Method): 
Ebeam
Researchers and (Mentors): 
Tim McKenna (Rich Tiberio)
Notes: 
PDF File: snsf_final_report_20190115.pdf
Presentation: 
Overview of JEOL EBL for Curved Structures
Runsheet: 
220 nm SOI photonics runsheet (2018-11-7)