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Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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SNF Lab Manual, link to google doc
SNF Lab Manual
SNF Lab Manual
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Gowning Procedure for Cleanroom L107
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Face shield cleaning using steamer
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Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
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Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
RIE Etchers
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CCP Etchers
Downstream Plasma Etchers
ICP Etchers
Legacy Dry Etch Equipment Overview
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Lithography Oven Equipment
Resist Coat Equipment
Resist Develop Equipment
Resist Exposure Equipment
Wet Chemical Processing (link to Processing Techniques)
Mavericks (Room 155)
Subfacility of:
SNF Exfab
Full Facility Name:
SNF ExFab Room 155 Mavericks
