Surface Micromachining Method for Releasing a Range of Micron-Scale Membranes- Final Report PDF File: Surface Micromachining Method for Releasing a Range of Micron-Scale Membranes- Final Report This should be displaying Surface Micromachining Method for Releasing a Range of Micron-Scale Membranes- Final Report inline. If it's not, look to see if your browser is set to automatically download pdf files.