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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
Safety Training
SDS
Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
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Overview/Equipment List
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Upcoming Training, link to NEMO
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All Litho class
Materials
Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
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Gases List
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Run NEMO (login required)
NEMO User Guide
External Links
Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
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For Emergencies
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Equipment
Equipment Name Table
Characterization
CVD
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Dry Etch
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Oxidation and Annealing
Photolithography
Wet Chemical Processing
Equipment Used
Nanoscribe Photonics GT (nanoscribe)
Nanoscribe Manual
Nanoscribe Manual
