Magnetically Enhanced RIE (MERIE) |
AMAT P5000 Etcher p5000etch |
P5000 is a magnetically enhanced reactive ion etching system (MERIE) for etching silicon based dielectrics (silicon dioxide, silcon nitride, etc.). P5000 is currently classified as CMOS restricted.
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Clean, Clean (Ge), Semiclean |
SNF Cleanroom Paul G Allen L107 |
Reactive Ion Etching (RIE) |
Plasmaetch PE-50 plasma-etch |
The Plasmaetch PE-50 is located in Venice, and is used primarily for surface treatment, for example with PDMS.
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Flexible |
SNF Exfab Paul G Allen 155 Mavericks |