Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
EVG Contact Aligner evalign |
Contact Aligner EVG Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Karl Suss MA-6 Contact Aligner karlsuss2 |
Contact Aligner Karl Suss MA-6 Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Karl Suss MA-6 Contact Aligner karlsuss |
Contact Aligner Karl Suss MA-6 Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Equipment name & NEMO ID | Technique | Cleanliness | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|
EVG Contact Aligner evalign |
All |
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
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one piece or wafer | ||
Karl Suss MA-6 Contact Aligner karlsuss2 |
All |
|
365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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|||
Karl Suss MA-6 Contact Aligner karlsuss |
All |
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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