Etching of wafers in lampoly with LiNb coated by resist
PROM Request Title:
Etching of wafers in lampoly with LiNb coated by resist
PROM Request Summary:
Request to modify previously approved process for etching of wafers containing LiNb, but not etching LiNb on lampoly
PROM Date:
01/22/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
