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Non-destructive Micro to Nanoscale Metal Patterning for Probing Thermal Anisotropy

Project Type: 
E241
Date: 
March 2019
Areas of Interest: 
Stencil lithography
Report(s): 
Stencil Lithography Introduction and Fabrication Guide
Non-destructive Micro to Nanoscale Metal Patterning for Probing Thermal Anisotropy- Final Report
Processing Technique (former Function and Method): 
Patterning
Researchers and (Mentors): 
Chris Perez, Heungdong Kwon, (Usha Raguram), (J Provine)
List of Important Equipment: 
AJA Evaporator (aja-evap)
Nano Nugget(s): 

Silicon Nitride Nanoscale Stencils for Non-destructive Metal Grating Patterning

A process flow is presented to create periodic metallic gratings on the order of 150 nm using a stencil lithography technique.