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Grayscale lithography for chiral nanophotonic structures

Project Type: 
June 2018
Areas of Interest: 
Grayscale lithography process development
Processing Technique (former Function and Method): 
Researchers and (Mentors): 
Jefferson Dixon, Michelle Solomon, (Swaroop Kommera)
List of Important Equipment: 
Nano Nugget(s): 

When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress.  This document provides some warnings and helpful tricks to overcome the common roadblocks.