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Function and Method(s):
Dry Etching
Equipment Used:
AMAT P5000 Etcher (p5000etch)
MRC Reactive Ion Etcher (mrc)
Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)
Summary of Oxide Dry Etch Processes in SNF
Summary of Dry Oxide Etch Processes in SNF
Source:
Summary of Dry Oxide Etch Processes in SNF
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