CO2 Drying

CO₂ drying is an efficient method of drying delicate samples without damaging their structure by surface tension that occurs when changing from the liquid to the gaseous phase.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
CO2 Drying, Wet Chemical Processing	Critical Point Dryer Tousimis Automegasamdri-936 cpd	Critical Point Drying (CPD) tool is used for carbon dioxide (CO2) drying after release of bulk or surface micromachined devices.	Flexible	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Chemicals	Substrate Size	Notes
CO2 Drying, Wet Chemical Processing	Critical Point Dryer Tousimis Automegasamdri-936 cpd	Flexible	CO₂	Pieces 2" 3" 4" 6"	CO2 drying after release of micromachined devices

Techniques

CO2 Drying

Technique Tabs