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TiN in Fiji3

PROM Request Title: 
TiN in Fiji3
PROM Request Summary: 
Request to run conductive films on Fiji3, which is outside the current use case to evaluate impact of turbo pump on O and C content of ALD nitride films. Films will be buried in SiO2 to prevent contamination for next users.
PROM Date: 
PROM Decision: 
Equipment List: