TiN in Fiji3
PROM Request Title:
TiN in Fiji3
PROM Request Summary:
Request to run conductive films on Fiji3, which is outside the current use case to evaluate impact of turbo pump on O and C content of ALD nitride films. Films will be buried in SiO2 to prevent contamination for next users.
PROM Date:
02/26/2019
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
