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Stanford University
Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
SNF Lab Manual
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Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
Prescription Safety Glasses
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All Litho class
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Overview
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"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
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ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
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NEMO User Guide
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Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
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For Emergencies
Staff List
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Process Staff Liaisons
Equipment
Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
MOCVD Equipment
ALD Equipment
PECVD Equipment
LPCVD Equipment
Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
RIE Etchers
Vapor Etchers
CCP Etchers
Downstream Plasma Etchers
ICP Etchers
Legacy Dry Etch Equipment Overview
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Lithography Oven Equipment
Resist Coat Equipment
Resist Develop Equipment
Resist Exposure Equipment
Wet Chemical Processing (link to Processing Techniques)
SNF
Full Facility Name:
Stanford Nanofabrication Facility
