Preferred Short Name:
Al-Etch
| Equipment name & NEMO ID |
Training Required & Charges |
Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Wet Bench CMOS Metal wbclean3 |
Wet Bench CMOS Metal (wbclean3) Training | SNF Paul G Allen L107 Cleanroom |
Al, Ti, or W wet etching or oxide etching |
||
|
Wet Bench Flexcorr 1 wbflexcorr-1 |
Wet Bench Flexcorr 1and2 and 3and4 Training 2.00 hours |
SNF Paul G Allen L107 Cleanroom |
Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only. |