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Stanford Nanofabrication Facility
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Polymer
Chemical Formula:
Various polymers
"Non standard" polymers require PROM approval for use in the labs.
Equipment Tabs
Etching Equipment
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Samco PC300 Plasma Etch System
samco
Flexible
SNF Cleanroom Paul G Allen L107
Resist
dimethylpolysiloxane
Si
Si3N4
SiO
2
SiON
Various polymers
PI
Projects
Basics of Block Copolymer Directed Self Assembly
-- (Nano Nugget)
Sub-micron metal patterning on polymer substrates using nitride nanostencil
-- (Report)
Sub-micron metal patterning on polymer substrates using nitride nanostencil
PROM requests
Block copolymer etch in lampoly