Sheet resistance is a common electrical property used to characterize thin films of conducting and semiconducting materials. It is a measure of the lateral resistance through a thin square of material, and it is independent of the size of the square.
| Processing Techniques |
Equipment name & NEMO ID |
Teaser Blurb | Cleanliness | Location |
|---|---|---|---|---|
| Sheet Resistance Measurement, Hall measurement |
Lakeshore Hall Measurement System LakeshoreHall |
Contactless sheet resistance mapping system for up to 8" wafer, based on eddy current |
"All" | SNF Exfab Paul G Allen 151 Ocean |
| Sheet Resistance Measurement |
LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
Contactless sheet resistance mapping system for up to 8" wafer, based on eddy current |
"All" | SNF Exfab Paul G Allen 151 Ocean |
| Sheet Resistance Measurement |
Prometrix Resistivity Mapping System prometrix |
Contact sheet resistance mapping system for 2"up to 8" wafers. |
"All" | SNF Paul G Allen L107 Cleanroom |