Dichlorosilane

DCS

Chemical Formula:

H₂SiCl₂

Gases Equipment Tabs

Etch Equipment Table

No equipment matches all of the filter criteria you have set above.

Anneal/Oxidation Equipment Table

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
Tystar Bank 2 Tube 7 Nitride B2T7 Clean Nitride	Clean	SNF Cleanroom Paul G Allen L107	25.00 Å - 2.00 μm	Si3N4 SiON
Tystar Bank 3 Tube 10 Nitride B3T10 Clean Nitride	Clean	SNF Cleanroom Paul G Allen L107	25.00 Å - 2.00 μm	Si3N4 SiON