Chemical Formula:
InGaP
| Equipment name & NEMO ID | Cleanliness | Location | Primary Materials Etched | Other Materials Etched |
|---|---|---|---|---|
|
MRC Reactive Ion Etcher mrc |
SNF Paul G Allen L107 Cleanroom |
|
||
|
Oxford III-V etcher Ox-35 |
SNF Paul G Allen L107 Cleanroom |