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Stanford Nanofabrication Facility

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Lithium Niobate

Chemical Formula:

LiNb

Equipment Tabs

Projects

Direct Bonding Chips with Tweezers -- (Nano Nugget)

Plasma activated direct bonding of silicon and lithium niobate thin films -- (Report)

Released Lithium Niobate Structures on Silicon using the PT-DSE -- (Report)

Plasma activated direct bonding of silicon and lithium niobate thin films

Released Lithium Niobate Structures on Silicon using the PT-DSE

PROM requests

CMP of Lithium Niobate wafer with silica cladding

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