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Stanford Nanofabrication Facility
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Metals or metal compounds with volatile byproducts
Equipment Tabs
Etching Equipment
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Plasma Therm Versaline LL ICP Metal Etcher
PT-MTL
Flexible
SNF Cleanroom Paul G Allen L107
Metals or metal compounds with volatile byproducts
Al
GaN
