Project Type:
E241
Date:
December 2014 (all day)
Areas of Interest:
SiNx stress and conformity, added strain from backside and sidewall deposition
Processing Technique (former Function and Method):
Researchers and (Mentors):
Ching-Ying Lu, Matthew Morea, (Usha Raghuram), (Jim McVittie), (Prof Jim Harris)
Presentation: