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Request for Bi-Sb-Te dry etch Ox-35 using Methane-H2
PROM Request Title:
Request for Bi-Sb-Te dry etch Ox-35 using Methane-H2
PROM Request Summary:
Technical concerns discussed and contamination evaluation plans are documented.
PROM Date:
08/13/2019
PROM Decision:
Dropped by requestor. Please see process staff for details.
Equipment List:
