Deposition covers a wide variety of methods that are used to add a wide variety of materials. The subcategories here can be useful to help narrow down your search.

  • Atomic Layer Deposition (ALD) is used to deposit less than 50nm of highly conformal films.
  • Chemical Vapor Deposition (CVD) is used to deposit films less than 5μm thick, carbon nanotubes, and graphene.
  • Deposited III-N uses a type of CVD called MOCVD to deposit the nitrides of materials that are found in group III of the periodic table.
  • Deposited III-V uses a type of CVD called MOCVD to deposit combinations of materials from group III and group V of the periodic table.
  • Ink lists the equipment that can be used to print inks that are either commercially available or made by the user.
  • Physical Vapor Deposition (PVD) is used to deposit primarily metal layers as well as some dielectrics.
Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Locationsort descending
Low Pressure (LP) CVD Tystar Bank 1 Tube 3 Poly
B1T3 Flexible Poly

LPCVD of Poly silicon, Amorphous Silicon, Doped Silicon, Silicon-Germanium.

Flexible SNF Paul G Allen L107 Cleanroom
Patterning, Ink Voltera
voltera
Flexible SNF Exfab Paul G Allen 151 Ocean
Sputtering Lesker Sputter
lesker-sputter
Flexible SNF Exfab Paul G Allen 155A Venice
Ink Optomec Printer
optomec-printer
Flexible SNF Exfab Paul G Allen 155A Venice
Evaporation AJA Evaporator
aja-evap
Flexible SNF Exfab Paul G Allen 155A Venice
Carbon Nanotube CVD Growth First Nano carbon nanotube CVD furnace
cvd-nanotube
Flexible SNF Exfab Paul G Allen L119 Año Nuevo
Graphene CVD Growth Aixtron Black Magic graphene CVD furnace
aixtron-graphene
Flexible SNF Exfab Paul G Allen L119 Año Nuevo
Metal-Organic (MO) CVD Aixtron MOCVD - III-N system
aix-ccs

Aixtron MOCVD for III-N semiconductors: InN, GaN, AlN, InGaN, InAlN, AlGaN, InGaAlN. Aix-ccs is a vertical metal organic chemical vapor deposition (MOCVD) system.

Clean (MOCVD) SNF MOCVD Paul G Allen 213XA
Metal-Organic (MO) CVD Aixtron MOCVD - III-V system
aix200
Flexible SNF MOCVD Paul G Allen 213XA
Deposition PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater
Flexible SNF Exfab Paul G Allen 155 Mavericks
Ink Fujifilm Dimatix Ink Jet Printer
nanoinkjet
Flexible SNF Exfab Paul G Allen 155 Mavericks
Deposition PDMS Workbench Flexible SNF Exfab Paul G Allen 155 Mavericks

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