Short Name:
4"
The following is a list of equipment where 4 inch round substrates are allowed.
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness |
Location |
Notes |
|---|---|---|---|---|
|
Profilometer AlphaStep D-300 alphastep2 |
AlphaStep2 Training | Flexible | SNF Exfab Paul G Allen 104 Stinson | |
|
Headway 3 Manual Resist Spinner headway3 |
Resist Coat (manual) Headway 3 Training | "All" | SNF Exfab Paul G Allen 104 Stinson | |
|
Ex Fab Develop Wet Bench wbexfab_dev |
WbExfab_Dev Training | Flexible | SNF Exfab Paul G Allen 104 Stinson |
Manual development of resist in beakers. SNF approved developers only. No solvents! |
|
Ex Fab Solvent Wet Bench wbexfab_solv |
WbExfab_Solv Training | Flexible | SNF Exfab Paul G Allen 104 Stinson | |
|
Finetech Lambda flipchipbonder |
Flip Chip Bonder Training | Flexible | SNF Exfab Paul G Allen 104 Stinson |