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Xenon Difluoride
Chemical Formula:
XeF
2
Gases Equipment Tabs
Etch Equipment Table
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Gases
Xactix Xenon Difluoride Etcher
xactix
All
SNF Cleanroom Paul G Allen L107
Ge
Si
SiGe
N
2
XeF
2
Anneal/Oxidation Equipment Table
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
