Oxford Plasma Pro PECVD
Ox-PECVD |
Oxford Plasma Pro PECVD Training |
Semiclean, Flexible |
SNF Paul G Allen L107 Cleanroom |
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Oxford Plasma Pro ICP-RIE ALE
Ox-ALE |
Oxford Plasma Pro ICP-RIE ALE Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
|
Profilometer AlphaStep D-300
alphastep2 |
AlphaStep2 Training |
Flexible |
SNF Exfab Paul G Allen 104 Stinson |
|
SEM -Zeiss Merlin
sem-merlin |
SEM-Merlin Training |
"All" |
SNF Exfab Paul G Allen 104 Stinson |
|
Lesker Sputter
lesker-sputter |
Sputter Lesker 1&2 Training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter |
Lesker2 Sputter
lesker2-sputter |
Sputter Lesker 1&2 Training |
Semiclean |
SNF Paul G Allen L107 Cleanroom |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter |
Samco PC300 Plasma Etch System
samco |
Samco Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
|
Lakeshore Hall Measurement System
LakeshoreHall |
Lakeshore Hall Measurement System training |
"All" |
SNF Exfab Paul G Allen 151 Ocean |
|
Technics Asher
technics |
Technics Asher Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
|
LEI1500 Contactless Sheet Resistance Mapping
eddycurrent |
LEI1500 Contactless Sheet Resistance Mapping Training |
"All" |
SNF Exfab Paul G Allen 151 Ocean |
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Keyence Digital Microscope VHX-6000
keyence |
Microscope Keyence Training |
"All" |
SNF Exfab Paul G Allen 104 Stinson |
|
PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater |
Parylene Coater Training |
Flexible |
SNF Exfab Paul G Allen 155 Mavericks |
|
Heidelberg MLA 150 - 2
heidelberg2 |
Heidelberg Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Direct Write |
Heidelberg MLA 150
heidelberg |
Heidelberg Training |
"All" |
SNF Exfab Paul G Allen 104 Stinson |
Direct Write |
AJA Evaporator
aja-evap |
Evaporator AJA training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance |
Oven (White)
white-oven |
White Oven Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C, programmable. |
Flexus 2320 Stress Tester
stresstest |
Stress Tester Flexus 2320 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
|
Sensofar S-neox
s-neox |
Sensofar S-neox Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
non contact 3D optical profiling |
HMDS Vapor Prime Oven, YES
yes |
YES Prime Oven Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Two programs: Singe and HMDS prime or Singe only. No Resist allowed! |
Xactix Xenon Difluoride Etcher
xactix |
Xactix Xenon Difluoride Etcher Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Isotropic Si etching; can be used for backside Si removal on small pieces |
