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Stanford Nanofabrication Facility
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Metals
Equipment Tabs
Etching Equipment
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Wet Bench Flexcorr 1
wbflexcorr-1
Flexible
SNF Cleanroom Paul G Allen L107
Metals
Al
Au
Cr
Si
SiO
2
Resist
GaAs
Si3N4
Ti
W
MRC Reactive Ion Etcher
mrc
Flexible
SNF Cleanroom Paul G Allen L107
Metals
Various Dielectrics
Metal oxides
PI
Projects
Sub-micron metal patterning on polymer substrates using nitride nanostencil
-- (Report)
Sub-micron metal patterning on polymer substrates using nitride nanostencil