Chemical Formula:
CO2
Supercritical Carbon Dioxide (liquid) is used to dry wet surfaces without surface tension. This is often effectively used in MEMS device fabrication.
| Equipment name & NEMO ID |
Training Required & Charges |
Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Critical Point Dryer Tousimis Automegasamdri-936 cpd |
Critical Point Dryer Training 2.00 hours |
SNF Paul G Allen L107 Cleanroom |
CO2 drying after release of micromachined devices |