Processing Technique Equipment name & NEMO ID Cleanliness Substrate Size Maximum Load (number of wafers) Notes Stylus Tip Radius
Step Profile Dektak XT-S Stylus Profiler SNSF NPC 1 12.5 µm
Step Profile Profilometer Alphastep 500
alphastep 		Flexible
1

500Å to 300µm

 5 µm
Step Profile Profilometer AlphaStep D-300
alphastep2 		Flexible
1 2 µm