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Returning Si/SOI (Si-on-insulator) to Clean Group for CMOS FEOL after UV

PROM Request Title: 
Returning Si/SOI (Si-on-insulator) to Clean Group for CMOS FEOL after UV
PROM Request Summary: 
Cleanliness category exception documented.
PROM Date: 
05/04/2021
PROM Decision: 
Request approved. Please see process staff for details.