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Request to expose pre-coated S1813 resist in SNF

PROM Request Title: 
Request to expose pre-coated S1813 resist in SNF
PROM Request Summary: 
Request to expose glass slides with S1813 resist in Karl Suss and develop in SNF.
PROM Date: 
12/05/2019
PROM Decision: 
Request approved. Please see process staff for details.