InSb Target for Lesker Sputter

PROM Request Title:

PROM Request Summary:

Request to use InSb target in high temperature sputter deposition using the Lesker Sputter.

PROM Date:

02/26/2019

PROM Decision:

NOT Approved. Since the tool is shared by many users who are operating all over the available temperature ranges, there are significant risks for the Sb left in the chamber after your run to migrate both into other's samples as well into areas of ...

Link to PROM Request and supporting documentation:

InSb Target for Lesker Sputter

Equipment List:

Lesker Sputter (lesker-sputter)