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Wet Etch of BTO Thin Film Using BOE+HNO3+DI

PROM Request Title: 
Wet Etch of BTO Thin Film Using BOE+HNO3+DI
PROM Request Summary: 
Request to do a chemical process similar to HNA in the SNF.
PROM Date: 
02/10/2020
PROM Decision: 
Request approved. Please see process staff for details.