Chemical Formula:
Ti
| Equipment name & NEMO ID | Cleanliness |
Location |
Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
Intlvac Evaporator Intlvac_evap |
SNF Paul G Allen L107 Cleanroom |
0.00 -
0.50 μm
|
||
|
Lesker2 Sputter lesker2-sputter |
SNF Paul G Allen L107 Cleanroom |
1.00 μm
|
||
|
AJA2 Evaporator aja2-evap |
SNF Paul G Allen L107 Cleanroom |
0.00 -
300.00 nm
|
||
|
CHA Solutions II Evaporator cha-evap |
SNF Paul G Allen L107 Cleanroom |
0.00 -
300.00 nm
|
||
|
AJA Evaporator aja-evap |
SNF Exfab Paul G Allen 155A Venice |
0.00 -
300.00 nm
|
||
|
Lesker Sputter lesker-sputter |
SNF Exfab Paul G Allen 155A Venice |
| Equipment name & NEMO ID | Cleanliness |
Location |
Primary Materials Etched | Other Materials Etched |
|---|---|---|---|---|
|
Wet Bench CMOS Metal wbclean3 |
SNF Paul G Allen L107 Cleanroom |
|
||
|
Wet Bench Flexcorr 1 wbflexcorr-1 |
SNF Paul G Allen L107 Cleanroom | |||
|
MRC Reactive Ion Etcher mrc |
SNF Paul G Allen L107 Cleanroom |
|