non contact 3D optical profiling
Wet Resist Removal: SRS-100 or PRS1000
Spray coating of resists
Resist as mask allowed
Automatic Resist spinning and bake
3 Probe Heads for different cleanliness groups.
Manual solvent cleaning, two ultrasonic baths.
Pieces need a carrier wafer; Isotropic Etching
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã
Direct Write
500Å to 300µm
