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Stanford Nanofabrication Facility
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SNF Lab Manual
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Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
Developers
Metal Etchants
Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Quartz
Chemical Formula:
SiO2
Equipment Tables
Summary
Specifications
Items per page
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- All -
Equipment name & NEMO ID
Training Required & Charges
sort ascending
Cleanliness
Location
Notes
Probe Station P200L
Probe Station P200L
Probe Station P200L Training
"All"
SNF Exfab Paul G Allen 151 Ocean
Oxford Plasma Pro PECVD
Ox-PECVD
Oxford Plasma Pro PECVD Training
Semiclean
,
Flexible
SNF Paul G Allen L107 Cleanroom
Oxford Plasma Pro ICP-RIE Ox
Ox-Ox
Oxford Plasma Pro ICP-RIE Ox Training
Clean
SNF Paul G Allen L107 Cleanroom
Oxford Plasma Pro ICP-RIE ALE
Ox-ALE
Oxford Plasma Pro ICP-RIE ALE Training
Flexible
SNF Paul G Allen L107 Cleanroom
CHA Solutions II Evaporator
cha-evap
Evaporator CHA Training
Flexible
SNF Paul G Allen L107 Cleanroom
For more than 300nm deposition, please contact Neel Mehta <nmehta26@stanford.edu> in advance
Tystar Bank 1 Tube 3 Poly
B1T3 Flexible Poly
Tystar LPCVD Tube Training
Flexible
SNF Paul G Allen L107 Cleanroom
Tystar Bank 3 Tube 12 Poly
B3T12 Clean Poly
Tystar LPCVD Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 3 Tube 10 Nitride
B3T10 Clean Nitride
Tystar LPCVD Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 2 Tube 7 Nitride
B2T7 Flexible Nitride
Tystar LPCVD Tube Training
Flexible
SNF Paul G Allen L107 Cleanroom
Tystar Bank 1 Tube 4 LTO
B1T4 Flexible LTO
Tystar LPCVD Tube Training
Flexible
SNF Paul G Allen L107 Cleanroom
Tystar Bank 3 Tube 11 TEOS
B3T11 Clean TEOS
Tystar LPCVD Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 2 Tube 8 LTO
B2T8 Clean LTO
Tystar LPCVD Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Oxford Plasma Pro ICP-RIE
Ox-gen
Ox-gen etcher Training
Flexible
SNF Paul G Allen L107 Cleanroom
Tystar Bank 2 Tube 5
B2T5 Clean Anneal
Tystar Atmospheric Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 2 Tube 6
B2T6 Clean Oxide
Tystar Atmospheric Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 3 Tube 9
B3T9 Clean Oxide
Tystar Atmospheric Tube Training
Clean
SNF Paul G Allen L107 Cleanroom
Tystar Bank 1 Tube 1 Anneal
B1T1 Flexible Oxide
Tystar Atmospheric Tube Training
Flexible
SNF Paul G Allen L107 Cleanroom
Tystar Bank 1 Tube 2
B1T2 Flexible Oxide
Tystar Atmospheric Tube Training
Flexible
SNF Paul G Allen L107 Cleanroom
Profilometer AlphaStep D-300
alphastep2
AlphaStep2 Training
Flexible
SNF Exfab Paul G Allen L104 Stinson
SEM -Zeiss Merlin
sem-merlin
SEM-Merlin Training
"All"
SNF Exfab Paul G Allen L104 Stinson
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