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Stanford Nanofabrication Facility
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SNF Lab Manual, link to google doc
SNF Lab Manual
SNF Lab Manual
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"Flexible" List of Tools
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Face shield cleaning using steamer
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Equipment Name Table
Characterization (link to Processing Techniques)
CVD (link to Processing Techniques)
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Doping (link to Processing Techniques)
Dry Etch (link to Processing Techniques)
RIE Etchers
Vapor Etchers
CCP Etchers
Downstream Plasma Etchers
ICP Etchers
Legacy Dry Etch Equipment Overview
Metallization (link to Processing Techniques)
Oxidation and Annealing (link to Processing Techniques)
Photolithography (link to Processing Techniques)
Lithography Oven Equipment
Resist Coat Equipment
Resist Develop Equipment
Resist Exposure Equipment
Wet Chemical Processing (link to Processing Techniques)
Materials
Section Menu
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Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
Acids
Bases
Developers
Metal Etchants
Other Chemicals
Primer
Resists
Solvents
Substrate Types and Sizes
Materials List
Gases List
Carbon Polymer Based
Chemical Formula:
Various
Equipment Tables
Summary
Specifications
Items per page
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10
20
40
50
60
- All -
Equipment name & NEMO ID
Training Required & Charges
Cleanliness
Location
Notes
Fiji 2 ALD
fiji2
ALD Fiji 1 and 2 Training
Flexible
SNF Paul G Allen L107 Cleanroom
Heidelberg MLA 150
heidelberg
Heidelberg Training
"All"
SNF Exfab Paul G Allen 104 Stinson
Direct Write
Heidelberg MLA 150 - 2
heidelberg2
Heidelberg Training
"All"
SNF Paul G Allen L107 Cleanroom
Direct Write
PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater
Parylene Coater Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Profilometer AlphaStep D-300
alphastep2
AlphaStep2 Training
Flexible
SNF Exfab Paul G Allen 104 Stinson
Samco PC300 Plasma Etch System
samco
Samco Training
Flexible
SNF Paul G Allen L107 Cleanroom
Savannah ALD
savannah
ALD Savannah Training
Flexible
SNF Paul G Allen L107 Cleanroom
Woollam
woollam
Woollam Training
"All"
SNF Paul G Allen L107 Cleanroom
