Short Name:
4"
The following is a list of equipment where 4 inch round substrates are allowed.
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness |
Location |
Notes |
|---|---|---|---|---|
|
Nanospec 210XP nanospec2 |
Nanospec Training | "All" | SNF Exfab Paul G Allen 104 Stinson |
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã |
|
Heidelberg MLA 150 heidelberg |
Heidelberg Training | "All" | SNF Exfab Paul G Allen 104 Stinson |
Direct Write |
|
Profilometer Alphastep 500 alphastep |
Alphastep 500 Profilometer Training | Flexible | SNF Exfab Paul G Allen 104 Stinson |
500Å to 300µm |
|
SEM -Zeiss Merlin sem-merlin |
SEM-Merlin Training | "All" | SNF Exfab Paul G Allen 104 Stinson | |
|
Profilometer AlphaStep D-300 alphastep2 |
AlphaStep2 Training | Flexible | SNF Exfab Paul G Allen 104 Stinson |