Short Name:
4"
The following is a list of equipment where 4 inch round substrates are allowed.
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
Finetech Lambda flipchipbonder |
Flip Chip Bonder Training | Flexible | SNF Exfab Paul G Allen L104 Stinson | |
|
Keyence Digital Microscope VHX-6000 keyence |
Microscope Keyence Training | "All" | SNF Exfab Paul G Allen L104 Stinson | |
|
Nanospec 210XP nanospec2 |
Nanospec Training | "All" | SNF Exfab Paul G Allen L104 Stinson |
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã |
|
Heidelberg MLA 150 heidelberg |
Heidelberg Training | "All" | SNF Exfab Paul G Allen L104 Stinson |
Direct Write |
|
Profilometer Alphastep 500 alphastep |
Alphastep 500 Profilometer Training | Flexible | SNF Exfab Paul G Allen L104 Stinson |
500Å to 300µm |
|
SEM -Zeiss Merlin sem-merlin |
SEM-Merlin Training | "All" | SNF Exfab Paul G Allen L104 Stinson | |
|
Profilometer AlphaStep D-300 alphastep2 |
AlphaStep2 Training | Flexible | SNF Exfab Paul G Allen L104 Stinson | |
| Prometrix Resistivity Mapping System |
3 Probe Heads for different cleanliness groups. |