The following is a list of equipment where 2 inch round substrates are allowed.
3 Probe Heads for different cleanliness groups.
Direct Write
Manual development of resist in beakers. SNF approved developers only. No solvents!
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã
500Å to 300µm
Spray coating of resists
Pieces need a carrier wafer; Isotropic Etching
Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
Two programs: Singe and HMDS prime or Singe only. No Resist allowed!