The "Flexible" cleanliness group is part of the SNF/ExFab contamination policy.
The following is a list of equipment that fall into the "Flexible" category.
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
Savannah ALD savannah |
ALD Savannah Training | Flexible | SNF Paul G Allen L107 Cleanroom | |
|
Fiji 3 ALD fiji3 |
ALD Fiji 3 Training | Flexible | SNF Paul G Allen L107 Cleanroom |
Restricted to non-conductive films only |
|
Fiji 2 ALD fiji2 |
ALD Fiji 1 and 2 Training | Flexible | SNF Paul G Allen L107 Cleanroom |